Abstract
Epitaxial Mo/V multilayers with modulation wavelength of ≈ 5-6 nm, and with total film thickness in the 120-150 nm range have been deposited onto polished (001) MgO substrates by magnetron sputtering. The characterisation of the as deposited multilayers and the study of thermal induced changes of superstructures have been performed by X-ray diffraction with CuKα radiation monochromatised by graphite crystal in the diffracted beam. The sharp and intense Bragg-peaks in the low angle region as well as the satellites around the central (002) Mo/V Bragg-peak near 60° indicated the presence of good quality as deposited structures of smooth Mo and V layers. The thermal stability of the films has been studied by annealing in vacuum at 1000-1700 K for various time periods, and by measuring the low and high angle XRD spectra after each step of heat treatment. In addition to the measurement of the thermal induced intensity changes of the low angle Braggpeaks, which are characteristic to the intermixing of the components, the inter- and intralayer structure as well as the quality of interfaces were estimated from simulation and fitting the measured high angle spectra by using the structural refinement program of SUPREX.
| Original language | English |
|---|---|
| Pages (from-to) | 463-468 |
| Number of pages | 6 |
| Journal | Materials Science Forum |
| Volume | 321-324 I |
| Publication status | Published - 2000 |
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XRD study of thermal stability of Mo/V crystalline multilayers. / Kis-Varga, M.; Dudás, A.; Langer, G.; Beke, D.; Kerekes, Gy; Daróczi, L.
In: Materials Science Forum, Vol. 321-324 I, 2000, p. 463-468.Research output: Article
}
TY - JOUR
T1 - XRD study of thermal stability of Mo/V crystalline multilayers
AU - Kis-Varga, M.
AU - Dudás, A.
AU - Langer, G.
AU - Beke, D.
AU - Kerekes, Gy
AU - Daróczi, L.
PY - 2000
Y1 - 2000
N2 - Epitaxial Mo/V multilayers with modulation wavelength of ≈ 5-6 nm, and with total film thickness in the 120-150 nm range have been deposited onto polished (001) MgO substrates by magnetron sputtering. The characterisation of the as deposited multilayers and the study of thermal induced changes of superstructures have been performed by X-ray diffraction with CuKα radiation monochromatised by graphite crystal in the diffracted beam. The sharp and intense Bragg-peaks in the low angle region as well as the satellites around the central (002) Mo/V Bragg-peak near 60° indicated the presence of good quality as deposited structures of smooth Mo and V layers. The thermal stability of the films has been studied by annealing in vacuum at 1000-1700 K for various time periods, and by measuring the low and high angle XRD spectra after each step of heat treatment. In addition to the measurement of the thermal induced intensity changes of the low angle Braggpeaks, which are characteristic to the intermixing of the components, the inter- and intralayer structure as well as the quality of interfaces were estimated from simulation and fitting the measured high angle spectra by using the structural refinement program of SUPREX.
AB - Epitaxial Mo/V multilayers with modulation wavelength of ≈ 5-6 nm, and with total film thickness in the 120-150 nm range have been deposited onto polished (001) MgO substrates by magnetron sputtering. The characterisation of the as deposited multilayers and the study of thermal induced changes of superstructures have been performed by X-ray diffraction with CuKα radiation monochromatised by graphite crystal in the diffracted beam. The sharp and intense Bragg-peaks in the low angle region as well as the satellites around the central (002) Mo/V Bragg-peak near 60° indicated the presence of good quality as deposited structures of smooth Mo and V layers. The thermal stability of the films has been studied by annealing in vacuum at 1000-1700 K for various time periods, and by measuring the low and high angle XRD spectra after each step of heat treatment. In addition to the measurement of the thermal induced intensity changes of the low angle Braggpeaks, which are characteristic to the intermixing of the components, the inter- and intralayer structure as well as the quality of interfaces were estimated from simulation and fitting the measured high angle spectra by using the structural refinement program of SUPREX.
KW - Epitaxial Multilayers
KW - Kinematical Modelling
KW - Structural Degradation
KW - Thermal Stability
UR - http://www.scopus.com/inward/record.url?scp=0343602895&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0343602895&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0343602895
VL - 321-324 I
SP - 463
EP - 468
JO - Materials Science Forum
JF - Materials Science Forum
SN - 0255-5476
ER -