Wet etch methods for InAs nanowire patterning and self-aligned electrical contacts

G. Fülöp, S. D'Hollosy, L. Hofstetter, A. Baumgartner, J. Nygård, C. Schönenberger, S. Csonka

Research output: Article

4 Citations (Scopus)


Advanced synthesis of semiconductor nanowires (NWs) enables their application in diverse fields, notably in chemical and electrical sensing, photovoltaics, or quantum electronic devices. In particular, indium arsenide (InAs) NWs are an ideal platform for quantum devices, e.g. they may host topological Majorana states. While the synthesis has been continously perfected, only a few techniques have been developed to tailor individual NWs after growth. Here we present three wet chemical etch methods for the post-growth morphological engineering of InAs NWs on the sub-100 nm scale. The first two methods allow the formation of self-aligned electrical contacts to etched NWs, while the third method results in conical shaped NW profiles ideal for creating smooth electrical potential gradients and shallow barriers. Low temperature experiments show that NWs with etched segments have stable transport characteristics and can serve as building blocks of quantum electronic devices. As an example we report the formation of a single electrically stable quantum dot between two etched NW segments.

Original languageEnglish
Article number195303
Issue number19
Publication statusPublished - ápr. 5 2016

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)

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    Fülöp, G., D'Hollosy, S., Hofstetter, L., Baumgartner, A., Nygård, J., Schönenberger, C., & Csonka, S. (2016). Wet etch methods for InAs nanowire patterning and self-aligned electrical contacts. Nanotechnology, 27(19), [195303]. https://doi.org/10.1088/0957-4484/27/19/195303