Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon

C. Savaniu, A. Arnautu, C. Cobianu, G. Craciun, C. Flueraru, M. Zaharescu, C. Parlog, F. Pászti, A. Van Den Berg

Research output: Article

19 Citations (Scopus)

Abstract

SnO2 sol-gel derived thin films doped simultaneously with Pt and Sb are obtained and reported for the first time. The Sn sources were tin(IV) ethoxide or tin(II) ethylhexanoate, while hexachloroplatinic acid (H2PtCl6) and antimony chloride (SbCl3) were used as platinum and antimony sources, respectively. Transparent, crack-free layers, deposited on silicon or porous silicon (PS) substrates were obtained with antimony doping in the range (0-2)% M, while the platinum addition was limited to maximum 1% M, due to the strong acidic character of the Pt and Sb precursors. Ternary sol (Pt:Sb:SnO2) stability was analyzed by viscosity studies while the surface roughness of the doped SnO2 layers on both types of substrates was investigated by atomic force microscopy (AFM) measurements. Rutherford Backscattering spectra (RBS) analysis proved that pores of PS substrates had been filled as a result of multiple spin-casting processes.

Original languageEnglish
Pages (from-to)29-35
Number of pages7
JournalThin Solid Films
Volume349
Issue number1
DOIs
Publication statusPublished - júl. 30 1999

Fingerprint

Tin dioxide
Antimony
Porous silicon
Platinum
antimony
porous silicon
dioxides
Sol-gels
tin
platinum
Tin
gels
Substrates
Rutherford backscattering spectroscopy
silicon
Polymethyl Methacrylate
Silicon
Sols
Spectrum analysis
spectrum analysis

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Savaniu, C., Arnautu, A., Cobianu, C., Craciun, G., Flueraru, C., Zaharescu, M., ... Van Den Berg, A. (1999). Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon. Thin Solid Films, 349(1), 29-35. https://doi.org/10.1016/S0040-6090(99)00141-8

Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon. / Savaniu, C.; Arnautu, A.; Cobianu, C.; Craciun, G.; Flueraru, C.; Zaharescu, M.; Parlog, C.; Pászti, F.; Van Den Berg, A.

In: Thin Solid Films, Vol. 349, No. 1, 30.07.1999, p. 29-35.

Research output: Article

Savaniu, C, Arnautu, A, Cobianu, C, Craciun, G, Flueraru, C, Zaharescu, M, Parlog, C, Pászti, F & Van Den Berg, A 1999, 'Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon', Thin Solid Films, vol. 349, no. 1, pp. 29-35. https://doi.org/10.1016/S0040-6090(99)00141-8
Savaniu C, Arnautu A, Cobianu C, Craciun G, Flueraru C, Zaharescu M et al. Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon. Thin Solid Films. 1999 júl. 30;349(1):29-35. https://doi.org/10.1016/S0040-6090(99)00141-8
Savaniu, C. ; Arnautu, A. ; Cobianu, C. ; Craciun, G. ; Flueraru, C. ; Zaharescu, M. ; Parlog, C. ; Pászti, F. ; Van Den Berg, A. / Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon. In: Thin Solid Films. 1999 ; Vol. 349, No. 1. pp. 29-35.
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AU - Parlog, C.

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AB - SnO2 sol-gel derived thin films doped simultaneously with Pt and Sb are obtained and reported for the first time. The Sn sources were tin(IV) ethoxide or tin(II) ethylhexanoate, while hexachloroplatinic acid (H2PtCl6) and antimony chloride (SbCl3) were used as platinum and antimony sources, respectively. Transparent, crack-free layers, deposited on silicon or porous silicon (PS) substrates were obtained with antimony doping in the range (0-2)% M, while the platinum addition was limited to maximum 1% M, due to the strong acidic character of the Pt and Sb precursors. Ternary sol (Pt:Sb:SnO2) stability was analyzed by viscosity studies while the surface roughness of the doped SnO2 layers on both types of substrates was investigated by atomic force microscopy (AFM) measurements. Rutherford Backscattering spectra (RBS) analysis proved that pores of PS substrates had been filled as a result of multiple spin-casting processes.

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