THz detection by modified thermopile

Béla Szentpáli, Gábor Matyi, Péter Fürjes, Endre László, Gábor Battistig, István Bársony, Gergely Károlyi, Tibor Berceli

Research output: Conference contribution

1 Citation (Scopus)


The modified micromachined thermopile consists of linearly arranged thermopairs instead of the usual loops. This device can act as a series of antennas and senses the millimeter wave radiation [1]. The antenna-like operation was demonstrated by the strong dependence on the polarization. The working principle is similar to the bolometers in that respect that the absorbed radiation heats up the semiconductor strips, but the temperature increment is sensed by the Seebeck effect instead of the resistance increment. Therefore there is no read-out current and the voltage output starts from zero. In the present work we are going to search absorption spectra of the device. It is shown that the resonance depends mainly on the dimensions and shape of the chip; the linear thermopiles are rather E-field probes. The fabrication of the device will be also outlined as well as the experimental results.

Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS V
Publication statusPublished - júl. 25 2011
EventSmart Sensors, Actuators, and MEMS V - Prague, Czech Republic
Duration: ápr. 18 2011ápr. 20 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherSmart Sensors, Actuators, and MEMS V
CountryCzech Republic

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Szentpáli, B., Matyi, G., Fürjes, P., László, E., Battistig, G., Bársony, I., Károlyi, G., & Berceli, T. (2011). THz detection by modified thermopile. In Smart Sensors, Actuators, and MEMS V [80661R] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8066).