The transition from linear to-parabolic growth of Cu3Si phase in Cu/a-Si system

Bence Parditka, Hanaa Zaka, Gábor Erdélyi, G. Langer, Mohammed Ibrahim, Guido Schmitz, Zoltán Balogh-Michels, Z. Erdélyi

Research output: Article

2 Citations (Scopus)

Abstract

The solid state reaction between Cu and a-Si films was investigated at 150–200 °C by depth profiling with secondary neutral mass spectrometry. Intermixing was observed leading to the formation of a homogeneous Cu3Si layer at the interface. The growth of the crystalline silicide follows a parabolic law at 165 °C and 200 °C. At 150 °C a transition from linear to parabolic kinetics is observed. Combining with our previous experimental results showing linear kinetics at 135 °C [Acta Materialia, 61 (2013) 7173–7179], the temperature dependence of the linear and parabolic coefficients as well as the transition length can be estimated.

Original languageEnglish
Pages (from-to)36-39
Number of pages4
JournalScripta Materialia
Volume149
DOIs
Publication statusPublished - máj. 1 2018

Fingerprint

Kinetics
Depth profiling
kinetics
Solid state reactions
Mass spectrometry
mass spectroscopy
Crystalline materials
solid state
temperature dependence
coefficients
Temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

The transition from linear to-parabolic growth of Cu3Si phase in Cu/a-Si system. / Parditka, Bence; Zaka, Hanaa; Erdélyi, Gábor; Langer, G.; Ibrahim, Mohammed; Schmitz, Guido; Balogh-Michels, Zoltán; Erdélyi, Z.

In: Scripta Materialia, Vol. 149, 01.05.2018, p. 36-39.

Research output: Article

Parditka, Bence ; Zaka, Hanaa ; Erdélyi, Gábor ; Langer, G. ; Ibrahim, Mohammed ; Schmitz, Guido ; Balogh-Michels, Zoltán ; Erdélyi, Z. / The transition from linear to-parabolic growth of Cu3Si phase in Cu/a-Si system. In: Scripta Materialia. 2018 ; Vol. 149. pp. 36-39.
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AU - Zaka, Hanaa

AU - Erdélyi, Gábor

AU - Langer, G.

AU - Ibrahim, Mohammed

AU - Schmitz, Guido

AU - Balogh-Michels, Zoltán

AU - Erdélyi, Z.

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