Test particle Monte Carlo study of backward deposition during evaporation into a background gas

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Abstract

A study on backward flow of laser ablated material during low-intensity evaporation into a background gas using the test particle Monte Carlo method is reported. Thickness profiles of the material deposited in the target plane are obtained for different evaporated particle masses and background gas pressures. The crossing of thickness profiles experimentally observed for different pressures is confirmed. Optimum background gas pressures, which yield the largest backward deposition rate, are determined for different mass ratios of the evaporated and background gas species.

Original languageEnglish
Article number015303
JournalJournal of Physics D: Applied Physics
Volume41
Issue number1
DOIs
Publication statusPublished - jan. 7 2008

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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