A study on backward flow of laser ablated material during low-intensity evaporation into a background gas using the test particle Monte Carlo method is reported. Thickness profiles of the material deposited in the target plane are obtained for different evaporated particle masses and background gas pressures. The crossing of thickness profiles experimentally observed for different pressures is confirmed. Optimum background gas pressures, which yield the largest backward deposition rate, are determined for different mass ratios of the evaporated and background gas species.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films