Structure related optical and mechanical properties of oxygen doped Al films

P. Barna, M. Adamik, U. Kaiser, S. Laux, H. Bangert, M. Pulliainen, K. A. Pischow

Research output: Article

10 Citations (Scopus)

Abstract

The present results clearly show that the structure of oxygen doped Al films varies from columnar polycrystalline to nanocrystalline and amorphous structure with increasing oxygen concentration. Through the whole scale of oxygen content the structural changes are accompanied by remarkable changes of optical and mechanical properties. The reflectance varies from pure metallic to pure dielectric behaviour. The hardness increases rapidly with increasing oxygen content in agreement with the Hall-Petch relation. The polarization resistance, however, is better for pure Al films.

Original languageEnglish
Pages (from-to)72-75
Number of pages4
JournalSurface and Coatings Technology
Volume100-101
Issue number1-3
Publication statusPublished - márc. 1998

Fingerprint

Optical properties
mechanical properties
Oxygen
optical properties
Mechanical properties
oxygen
nanostructure (characteristics)
hardness
Hardness
Polarization
reflectance
polarization

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Barna, P., Adamik, M., Kaiser, U., Laux, S., Bangert, H., Pulliainen, M., & Pischow, K. A. (1998). Structure related optical and mechanical properties of oxygen doped Al films. Surface and Coatings Technology, 100-101(1-3), 72-75.

Structure related optical and mechanical properties of oxygen doped Al films. / Barna, P.; Adamik, M.; Kaiser, U.; Laux, S.; Bangert, H.; Pulliainen, M.; Pischow, K. A.

In: Surface and Coatings Technology, Vol. 100-101, No. 1-3, 03.1998, p. 72-75.

Research output: Article

Barna, P, Adamik, M, Kaiser, U, Laux, S, Bangert, H, Pulliainen, M & Pischow, KA 1998, 'Structure related optical and mechanical properties of oxygen doped Al films', Surface and Coatings Technology, vol. 100-101, no. 1-3, pp. 72-75.
Barna P, Adamik M, Kaiser U, Laux S, Bangert H, Pulliainen M et al. Structure related optical and mechanical properties of oxygen doped Al films. Surface and Coatings Technology. 1998 márc.;100-101(1-3):72-75.
Barna, P. ; Adamik, M. ; Kaiser, U. ; Laux, S. ; Bangert, H. ; Pulliainen, M. ; Pischow, K. A. / Structure related optical and mechanical properties of oxygen doped Al films. In: Surface and Coatings Technology. 1998 ; Vol. 100-101, No. 1-3. pp. 72-75.
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