The structure evolution characteristics of NdF3 thin films has been analyzed concerning texture and grain morphology. The structure could be classified according to the structure zone models, and the growth mode could be related to zone T and zone II. Contamination of the films by residual gases was found to inhibit the migration of grain boundaries and therefore, zone II does not appear even at high substrate temperatures in contaminated films. Stratification by MgF2 interlayers may also result in a decrease of grain size and a smaller surface roughness. The correlation between deposition conditions, stratification, growth mode and optical properties is discussed.
|Number of pages||13|
|Journal||Physica Status Solidi (A) Applied Research|
|Publication status||Published - okt. 1 1999|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics