Structure and composition of carbon-nitride films grown by sub-ps PLD

Research output: Article

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Abstract

CN x (0.01<x<0.20) films have been deposited by ablating a graphite target in N 2 atmosphere with a hybrid dye/excimer laser system delivering pulses of 500 fs duration at 248 nm. Changes in surface composition and morphology of the as grown films, as a function of N 2 pressure (between 0.3 and 60Pa), laser pulse energy (maximum 10mJ), and spot area are reported, by means of X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM), respectively. In the pressure domain investigated, the nitrogen content increases as a power function. While both pulse energy and spot area influence the chemical composition of the films, the same fluence achieved by using different spot sizes results in films of different N content. Deposition of micrometer sized particulates is apparently suppressed, while sub-micron features of typically circular shape are present over the smooth film surface.

Original languageEnglish
Pages (from-to)547-552
Number of pages6
JournalApplied Surface Science
Volume208-209
Issue number1
DOIs
Publication statusPublished - márc. 15 2003

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ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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