The nickel metal-induced-lateral-crystallized silicon films are studied in detail. Laterally grown crystalline grains can be as large as 17 μm, though the grains consist of small misorientated sub-grains and some sub-grains are divided further into overlapping upper and lower sub-grains. The nickel-induced crystallization starts with thin needle-like crystallites, which advance along the 〈111〉 directions within the film plane. These thin needle-like crystallites grow by successive jumps with a very fast growth rate. The fast growth rate and the small probability that the 〈111〉 growth directions are within the film plane result in the laterally grown large grains.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Materials Science(all)
- Condensed Matter Physics