Structural evaluation of a Mo/Si multilayer, analyzed with various wavelengths

Y. Ito, T. Mukoyama, K. Omote, K. Shimizu, A. Nisawa, T. Shoji, H. Terauchi, S. Kuehner

Research output: Article

Abstract

A Mo/Si multilayer is synthesized and its structure is evaluated on an atomic scale using various soft X-rays (MgKα, FKα, OKα, and CKα). Two types of models based on the optical and diffraction methods were considered. It is found that the latter theory is more effective in extracting the multilayer structure.

Original languageEnglish
Pages (from-to)355-359
Number of pages5
JournalNuclear Inst. and Methods in Physics Research, B
Volume75
Issue number1-4
DOIs
Publication statusPublished - ápr. 3 1993

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ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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