Structural evaluation of a Mo/Si multilayer, analyzed with various wavelengths

Y. Ito, T. Mukoyama, K. Omote, K. Shimizu, A. Nisawa, T. Shoji, H. Terauchi, S. Kuehner

Research output: Article


A Mo/Si multilayer is synthesized and its structure is evaluated on an atomic scale using various soft X-rays (MgKα, FKα, OKα, and CKα). Two types of models based on the optical and diffraction methods were considered. It is found that the latter theory is more effective in extracting the multilayer structure.

Original languageEnglish
Pages (from-to)355-359
Number of pages5
JournalNuclear Inst. and Methods in Physics Research, B
Issue number1-4
Publication statusPublished - ápr. 3 1993


ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this