Segregation of impurities due to pulsed laser beam annealing

I. B. Khaibullin, E. I. Shtyrkov, R. M. Bayazitov, R. A. Aganov, T. Lohner, G. Mezey, F. Pászti, A. Manuaba, E. Kótai, J. Gyulai

Research output: Article

2 Citations (Scopus)

Abstract

A simple theory of the redistribution and segregation of the solutes which occur during the solidification after pulsed laser beam annealing is presented. For experimental verification, the laser processing of Bi+ implants at different doses was investigated by backscattering spectroscopy and a qualitative agreement between the experimental and calculated values was found.

Original languageEnglish
Pages (from-to)397-400
Number of pages4
JournalNuclear instruments and methods in physics research
Volume199
Issue number1-2
DOIs
Publication statusPublished - aug. 1 1982

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Khaibullin, I. B., Shtyrkov, E. I., Bayazitov, R. M., Aganov, R. A., Lohner, T., Mezey, G., Pászti, F., Manuaba, A., Kótai, E., & Gyulai, J. (1982). Segregation of impurities due to pulsed laser beam annealing. Nuclear instruments and methods in physics research, 199(1-2), 397-400. https://doi.org/10.1016/0167-5087(82)90242-3