Scanning electron microscopy of the microtopography of a (111) silicon surface

D. Katzer, G. Sáfrán

Research output: Article

9 Citations (Scopus)

Abstract

The surface steps were imaged by a special decoration technique based on the reaction between gold and silicon atoms. As example of application results are shown concerning evaporation step kinetics.

Original languageEnglish
Pages (from-to)135-138
Number of pages4
JournalUltramicroscopy
Volume15
Issue number1-2
DOIs
Publication statusPublished - 1984

Fingerprint

Silicon
Gold
Evaporation
Atoms
Scanning electron microscopy
scanning electron microscopy
Kinetics
silicon
evaporation
gold
kinetics
atoms

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation

Cite this

Scanning electron microscopy of the microtopography of a (111) silicon surface. / Katzer, D.; Sáfrán, G.

In: Ultramicroscopy, Vol. 15, No. 1-2, 1984, p. 135-138.

Research output: Article

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