Refractive index variation of magnetron-sputtered a-Si1-xGex by "one-sample concept" combinatory

T. Lohner, Benjamin Kalas, P. Petrik, Z. Zolnai, Miklós Serényi, G. Sáfrán

Research output: Article

1 Citation (Scopus)


Gradient a-Si1-xGex layers have been deposited by "one-sample concept" combinatorial direct current (DC) magnetron sputtering onto one-inch-long Si slabs. Characterizations by electron microscopy, ion beam analysis and ellipsometry show that the layers are amorphous with a uniform thickness, small roughness and compositions from x = 0 to x = 1 changing linearly with the lateral position. By focused-beam mapping ellipsometry, we show that the optical constants also vary linearly with the lateral position, implying that the optical constants are linear functions of the composition. Both the refractive index and the extinction coefficient can be varied in a broad range for a large spectral region. The precise control and the knowledge of layer properties as a function of composition is of primary importance in many applications from solar cells to sensors.

Original languageEnglish
Article number826
JournalApplied Sciences (Switzerland)
Issue number5
Publication statusPublished - máj. 21 2018

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Engineering(all)
  • Process Chemistry and Technology
  • Computer Science Applications
  • Fluid Flow and Transfer Processes

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