Pulsed laser ablation mechanisms of thin metal films

Zsolt Toth, Bela Hopp, Tamas Szorenyi, Zsolt Bor, Elena A. Shakhno, Vadim P. Veiko

Research output: Conference article

16 Citations (Scopus)

Abstract

The ablation of thin films by single laser pulses is a well known technique with widespread industrial applications. Ablation occurs in a well defined power density region if a supported thin film is illuminated by a single laser pulse. In the literature there are a number of theoretical description of ablation, but a very few based on in-situ experiments. In our study we have directly visualized the ablation processes with fast photography based on application of dye laser probe pulses. The ablation of chromium and tungsten layers supported onto glass substrates with pulses of ArF excimer laser was investigated. The ablated area was illuminated by a delayed short pulse of a fluorescein dye laser or a Rhodamine6G dye laser. Snapshots of initial phase of ablation and the forthcoming material transport were recorded by an optical system and a video camera. Blowing-off mechanisms and thermo-mechanical mechanisms are considered to take place during ablation. Pressures formed during laser ablation were calculated and compared with experimental data. It was found that thermo-desorption of gas adsorbed on to the substrate surface, substrate material evaporation and film exfoliation by its longitudinal thermal enlargement may be acting during laser ablation of thin films.

Original languageEnglish
Pages (from-to)18-26
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3822
Publication statusPublished - dec. 1 1999
EventProceedings of the 1999 Computer-Controlled Microshaping - Munich, Ger
Duration: jún. 16 1999jún. 18 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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