PERIODIC STRUCTURES IN LASER-INDUCED DIRECT WRITING OF POLY-SILICON.

T. Szorenyi, G. Q. Zhang, Y. C. Du, R. Kullmer, D. Baeuerle

Research output: Conference contribution

1 Citation (Scopus)

Abstract

In pyrolytic direct writing various different types of periodic structures are observed in a large number of systems for certain ranges of processing parameters. These structures have been further investigated, mainly for polycrystalline Si deposited on glass substrates covered with a thin amorphous Si layer.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
EditorsD. Baeuerle, K.L. Kompa, L. Laude
PublisherLes Editions de Physique
Pages91-94
Number of pages4
ISBN (Print)2868830404
Publication statusPublished - dec. 1 1986

    Fingerprint

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Szorenyi, T., Zhang, G. Q., Du, Y. C., Kullmer, R., & Baeuerle, D. (1986). PERIODIC STRUCTURES IN LASER-INDUCED DIRECT WRITING OF POLY-SILICON. In D. Baeuerle, K. L. Kompa, & L. Laude (Eds.), Unknown Host Publication Title (pp. 91-94). Les Editions de Physique.