Organic solutions of triphenylphosphine gold complexes: attractive new candidates for gold deposition

K. Bali, T. Szörényi, M. R. Brook, G. A. Shafeev, K. I. Grandberg

Research output: Article

8 Citations (Scopus)

Abstract

Organic solutions of triphenylphosphine gold(I) complexes are attractive precursors for effective laser direct wiring. Under optimized conditions, gold lines of appropriate morphology and electrical resistivities between 9 and 22 μω cm are deposited at low powers and writing speeds significantly higher than those typical for laser chemical vapour deposition. The poor adhesion of the lines, which is a consequence of low deposition temperature, can be improved by increasing the scanning speed. It is shown that deposition from liquid precursors offers a straightforward way to convert the obvious advantages of the high precursor concentration into economic writing speeds.

Original languageEnglish
Pages (from-to)101-103
Number of pages3
JournalMaterials Science and Engineering B
Volume17
Issue number1-3
DOIs
Publication statusPublished - febr. 28 1993

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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