Abstract
Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.
Original language | English |
---|---|
Pages (from-to) | 63-67 |
Number of pages | 5 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 85 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - márc. 2 1994 |
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ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Optimization of the depth resolution in ERDA of H using 12C ions. / Szilágyi, E.; Pászti, F.; Quillet, V.; Abel, F.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 85, No. 1-4, 02.03.1994, p. 63-67.Research output: Article
}
TY - JOUR
T1 - Optimization of the depth resolution in ERDA of H using 12C ions
AU - Szilágyi, E.
AU - Pászti, F.
AU - Quillet, V.
AU - Abel, F.
PY - 1994/3/2
Y1 - 1994/3/2
N2 - Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.
AB - Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.
UR - http://www.scopus.com/inward/record.url?scp=0347853696&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0347853696&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(94)95787-8
DO - 10.1016/0168-583X(94)95787-8
M3 - Article
AN - SCOPUS:0347853696
VL - 85
SP - 63
EP - 67
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-4
ER -