Optimization of the depth resolution in ERDA of H using 12C ions

E. Szilágyi; F. Pászti; V. Quillet; F. Abel

doi:10.1016/0168-583X(94)95787-8

Optimization of the depth resolution in ERDA of H using ¹²C ions

E. Szilágyi, F. Pászti, V. Quillet, F. Abel

Magyar Tudományos Akadémia

Research output: Article

17 Citations (Scopus)

Abstract

Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a ¹²C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.

Original language	English
Pages (from-to)	63-67
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	85
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(94)95787-8
Publication status	Published - márc. 2 1994

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Ions

optimization

Depth profiling

Metal foil

ions

Geometry

Hungary

congressional reports

foils

absorbers

inhomogeneity

geometry

approximation

titanium nickelide

ASJC Scopus subject areas

Surfaces, Coatings and Films
Instrumentation
Surfaces and Interfaces

Cite this

Szilágyi, E., Pászti, F., Quillet, V., & Abel, F. (1994). Optimization of the depth resolution in ERDA of H using ¹²C ions. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 85(1-4), 63-67. https://doi.org/10.1016/0168-583X(94)95787-8

Optimization of the depth resolution in ERDA of H using ¹²C ions. / Szilágyi, E.; Pászti, F.; Quillet, V.; Abel, F.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 85, No. 1-4, 02.03.1994, p. 63-67.

Research output: Article

Szilágyi, E , Pászti, F, Quillet, V & Abel, F 1994, 'Optimization of the depth resolution in ERDA of H using ¹²C ions', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 85, no. 1-4, pp. 63-67. https://doi.org/10.1016/0168-583X(94)95787-8

Szilágyi E , Pászti F, Quillet V, Abel F. Optimization of the depth resolution in ERDA of H using ¹²C ions. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1994 márc. 2;85(1-4):63-67. https://doi.org/10.1016/0168-583X(94)95787-8

Szilágyi, E. ; Pászti, F. ; Quillet, V. ; Abel, F. / Optimization of the depth resolution in ERDA of H using ¹²C ions. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1994 ; Vol. 85, No. 1-4. pp. 63-67.

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10.1016/0168-583X(94)95787-8