Optimization of physical filtering for selective high temperature H2 sensors

T. Weh, M. Fleischer, H. Meixner

Research output: Conference article

19 Citations (Scopus)

Abstract

This paper investigates the improvement in selectivity by means of applying a physical gas filter. Looking for a selective and highly sensitive hydrogen sensor, various filter systems, single, dual and buried filter systems, were deposited on top of a basic high-temperature semiconducting Ga2O3 thin film sensor. Sensor respondence on a big variety of gases present in domestic ambience and especially hydrogen and ethane, which is the hardest test on cross sensitivity, is shown. Using a single filter SiO2 layer a selective hydrogen sensor is realized, which is able to detect 50 ppm hydrogen at an operation temperature of 700°C in humid air without any interference caused by other gases. Dual SiO2/metal oxide filter systems and buried metal oxide layer filters show behaviors varying from selective ethane to selective hydrogen detection.

Original languageEnglish
Pages (from-to)146-150
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume68
Issue number1
DOIs
Publication statusPublished - aug. 25 2000
EventProceedings of Eurosensors XIII - The Hague, Neth
Duration: szept. 12 1999szept. 15 1999

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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