Optical characterization of macro-, micro- and nanostructures using polarized light

P. Petrik, N. Kumar, G. Juhasz, C. Major, B. Fodor, E. Agocs, T. Lohner, S. F. Pereira, H. P. Urbach, M. Fried

Research output: Conference article

6 Citations (Scopus)


Reflection of light measured in a polarimetric, scatterometric and spectroscopic way allows the measurement of structures in a broad size range from large (meter) scales like photovoltaic panels down to small (nanometer) scales like nanocrystals. Optical metrology continues to be improved to measure those materials with increasing sensitivity and accuracy, typically in a form of thin films on high quality substrates. This review provides an overview of some recently developed or improved methods, e.g. divergent light source ellipsometry for the mapping of large surfaces for photovoltaic applications, Fourier scatterometry for the measurement of periodic structures with sizes comparable to the wavelength of illumination, as well as spectroscopy around the band gap photon energies to characterize nanostructures - without attempting completeness.

Original languageEnglish
Article number012008
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2014
Event18th International School on Condensed Matter Physics - Challenges of Nanoscale Science: Theory, Materials, Applications, ISCMP 2014 - Varna, Bulgaria
Duration: szept. 1 2014szept. 6 2014

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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