Optical and structural characterization of Ge clusters embedded in ZrO 2

E. Agocs, Z. Zolnai, A. K. Rossall, J. A. van den Berg, B. Fodor, D. Lehninger, L. Khomenkova, S. Ponomaryov, O. Gudymenko, V. Yukhymchuk, B. Kalas, J. Heitmann, P. Petrik

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2 Citations (Scopus)


The change of optical and structural properties of Ge nanoclusters in ZrO 2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO 2 and Ge-rich-ZrO 2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO 2 layers alternated by 5-nm-ZrO 2 ones. Germanium nanoclusters in ZrO 2 host were formed by rapid-thermal annealing at 600–800 °C during 30 s in nitrogen atmosphere. Reference optical properties for pure ZrO 2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models.

Original languageEnglish
Pages (from-to)283-288
Number of pages6
JournalApplied Surface Science
Publication statusPublished - nov. 1 2017

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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    Agocs, E., Zolnai, Z., Rossall, A. K., van den Berg, J. A., Fodor, B., Lehninger, D., Khomenkova, L., Ponomaryov, S., Gudymenko, O., Yukhymchuk, V., Kalas, B., Heitmann, J., & Petrik, P. (2017). Optical and structural characterization of Ge clusters embedded in ZrO 2 Applied Surface Science, 421, 283-288. https://doi.org/10.1016/j.apsusc.2017.03.153