Nano-structured WO3 layers sensitized with ALD Pt for quick detection of H2S

Máté Takács, Csaba Dücső, Andrea Edit Pap

Research output: Article

Abstract

WO3 nano-structured layers on top of micro-hotplates were formed by sol–gel deposition technique and electrochemical anodic etching of thin tungsten layers. Both types of gas sensing layers were activated by drop coated Pt nano-particles and alternatively, by atomic layer deposited (ALD) Pt. Due to the limited number of ALD cycles the Pt layer is not a contiguous but composed of uniformly distributed nano-particles of 2–3 nm size. Devices were characterized by their responses for exposure of H2S and NH3. Investigation of sensitivity, selectivity and device dynamics revealed that the ALD sensitized, electrochemically formed porous WO3 layer is suitable for quick detection of H2S.

Original languageEnglish
Pages (from-to)17148-17155
Number of pages8
JournalJournal of Materials Science: Materials in Electronics
Volume28
Issue number22
DOIs
Publication statusPublished - nov. 1 2017

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Tungsten
Etching
Gases
tungsten
selectivity
etching
cycles
sensitivity
gases

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Nano-structured WO3 layers sensitized with ALD Pt for quick detection of H2S. / Takács, Máté; Dücső, Csaba; Pap, Andrea Edit.

In: Journal of Materials Science: Materials in Electronics, Vol. 28, No. 22, 01.11.2017, p. 17148-17155.

Research output: Article

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