Morphological investigation of the electrochemically etched GaAs (001) surface

Ákos Nemcsics, Miklós Schuszter, László Dobos, Gyozo Ballai

Research output: Article

11 Citations (Scopus)

Abstract

In this paper, we investigate pattern formation on GaAs (001) surface after electrochemical layer removal by different aqueous HCl based electrolytes. Under polishing (non-selective) etching conditions the surface morphology displayed fractal behaviour. The morphological investigation of the surface was carried out using digital processing of scanning electron microscope images. The patterns were segmented by the so called grade of membership technique. Fractal properties were established using the box counting method.

Original languageEnglish
Pages (from-to)67-71
Number of pages5
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume90
Issue number1-2
DOIs
Publication statusPublished - márc. 7 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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