Molten targets in pulsed laser deposition

Tamás Szörényi, Zoltán Kántor, Zsolt Tóth

Research output: Conference article

Abstract

An inherent problem of Pulsed Laser Deposition (PLD) is the undesired particulate formation which is assigned to the deterioration of the solid target surface upon repetitive ablation and instabilities due to fast phase transitions. It could be expected (and has also been claimed by several authors) that ablating liquid targets, i.e. self-reproducing smooth surfaces allows for particulate-free fill deposition. In spite of a couple of impressive experiments, it was not yet clarified whether particulate formation was avoided by the use of the liquid target, or only particulate deposition was avoided by choosing appropriate experimental circumstances. In this paper we aimed at answering this question. For this purpose we deposited indium fills by ablating solid and liquid indium targets in vacuum (i.e. we deposited the same metal as we ablated). The substrates were held at room-temperature in order to collect and preserve the droplets formed. Using molten targets, the particulate number density decreased by orders of magnitude as compared to the solid-target case. However, particulate formation could not be totally eliminated, which led us to the conclusion that this technique does not offer an ultimate solution, either.

Original languageEnglish
Pages (from-to)2-7
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3404
DOIs
Publication statusPublished - dec. 1 1997
EventALT 1997 International Conference on Laser Surface Processing - Limoges, France
Duration: szept. 8 1997szept. 12 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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