Mechanical properties and deformation behavior of ZnO thin films under illumination

Péter Horváth, George Kiriakidis, Péter M. Nagy, Savas Christoulakis

Research output: Conference contribution

1 Citation (Scopus)

Abstract

As a wide band gap semiconductor with a large exciton binding energy (60 meV), zinc oxide (ZnO) has many existing and promising future applications. The main objective of this work was to study the mechanical properties and deformation behavior of undoped ZnO thin films grown by direct current magnetron sputtering technique in the light of their possible application on SPM cantilevers. Nanoindentation techniques and scratch tests were carried out in order to investigate mechanical properties of a ZnO thickness series deposited under the same sputtering conditions. Nanoindentation measurements were also applied on specific ZnO/Si and ZnO/glass structures in darkness and under illumination utilizing a low power mercury lamp with the aim of understanding the impact of the UV irradiation on the mechanical properties of the ZnO layer.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages421-425
Number of pages5
DOIs
Publication statusPublished - aug. 28 2007
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: jan. 16 2007jan. 19 2007

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period1/16/071/19/07

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ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Horváth, P., Kiriakidis, G., Nagy, P. M., & Christoulakis, S. (2007). Mechanical properties and deformation behavior of ZnO thin films under illumination. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 421-425). [4160353] (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352050