Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

J. Endres, N. Kumar, P. Petrik, M. A. Henn, S. Heidenreich, S. F. Pereira, H. P. Urbach, B. Bodermann

Research output: Conference contribution

7 Citations (Scopus)

Abstract

Scatterometry is a common tool for the dimensional characterization of periodic nanostructures. In this paper we compare measurement results of two different scatterometric methods: a goniometric DUV scatterometer and a coherent scanning Fourier scatterometer. We present a comparison between these two methods by analyzing the measurement results on a silicon wafer with 1D gratings having periods between 300 nm and 600 nm. The measurements have been performed with PTB's goniometric DUV scatterometer and the coherent scanning Fourier scatterometer at TU Delft. Moreover for the parameter reconstruction of the goniometric measurement data, we apply a maximum likelihood estimation, which provides the statistical error model parameters directly from measurement data.

Original languageEnglish
Title of host publicationOptical Micro- and Nanometrology V
PublisherSPIE
ISBN (Print)9781628410808
DOIs
Publication statusPublished - jan. 1 2014
EventOptical Micro- and Nanometrology V - Brussels, Belgium
Duration: ápr. 15 2014ápr. 17 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9132
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherOptical Micro- and Nanometrology V
CountryBelgium
CityBrussels
Period4/15/144/17/14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Endres, J., Kumar, N., Petrik, P., Henn, M. A., Heidenreich, S., Pereira, S. F., Urbach, H. P., & Bodermann, B. (2014). Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry. In Optical Micro- and Nanometrology V [913208] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9132). SPIE. https://doi.org/10.1117/12.2052819