Mass spectrometric determination of trace oxygen

L. Lieszkovszky, J. Borossay

Research output: Article

Abstract

The calibration factor of the oxygenlargon ion current ratio has been found to depend on the background of the mass spectrometer in the 1-1000 ppm oxygen (in argon) range. Adsorption on the surface seems to be responsible for the phenomenon. Coverage-dependent pumping speed of the surface is assumed in the interpretation ofthe results. By applying the background-dependent calibration curve instead of a simple factor, accuracy greater than 10% can be achieved with substantially fewer calibration measurements.

Original languageEnglish
Pages (from-to)2819-2822
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number5
DOIs
Publication statusPublished - 1987

Fingerprint

Calibration
Oxygen
oxygen
ion currents
mass spectrometers
pumping
Argon
argon
Mass spectrometers
adsorption
curves
Ions
Adsorption

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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abstract = "The calibration factor of the oxygenlargon ion current ratio has been found to depend on the background of the mass spectrometer in the 1-1000 ppm oxygen (in argon) range. Adsorption on the surface seems to be responsible for the phenomenon. Coverage-dependent pumping speed of the surface is assumed in the interpretation ofthe results. By applying the background-dependent calibration curve instead of a simple factor, accuracy greater than 10{\%} can be achieved with substantially fewer calibration measurements.",
author = "L. Lieszkovszky and J. Borossay",
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