Makyoh topography: curvature measurements and implications for the image formation

Janos Szabo, Ferenc Riesz, Bela Szentpali

Research output: Article

15 Citations (Scopus)

Abstract

A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, 'contour' image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.

Original languageEnglish
Pages (from-to)L258-L261
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume35
Issue number2 B
DOIs
Publication statusPublished - jan. 1 1996

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Makyoh topography: curvature measurements and implications for the image formation'. Together they form a unique fingerprint.

  • Cite this