KrF excimer laser processing of thick diamond-like carbon films

R. Danyi, T. Szörényi

Research output: Article

4 Citations (Scopus)

Abstract

Ablation characteristics of a commercially available diamond-like carbon (DLC) film (the EVERSCAN™ bar code scanner window; Diamonex Division of Morgan Advanced Ceramics Inc.) in the 0-7 J cm-2 fluence window are reported. Glass pieces covered with 6 μm thick DLC coating are ablated by 22 ns pulses of a KrF excimer laser in medium vacuum (10-1 Pa), and in Ar and O2 atmospheres of 105 Pa. The ablation depth increases strictly linearly with an increasing number of pulses, independently of the atmosphere and the applied fluence. The threshold lies at 0.13 J cm -2 and is independent of the atmosphere. While above 1 J cm -2 the ablation rate vs. fluence plots recorded in different atmospheres coincide within experimental error, processing under vacuum between 0.5 and 1 Jcm-2 results in significantly higher ablation rate values. Ablation rates exceeding 100 nm/pulse above 1 Jcm-2 ensure extremely efficient machining over extended areas even at relatively low fluences. Identical characteristics in Ar and O2 atmospheres suggest that solely physical (ablative) processes contribute to material removal.

Original languageEnglish
Pages (from-to)1373-1376
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume79
Issue number4-6
DOIs
Publication statusPublished - jan. 1 2004

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ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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