Ion behavior in capacitively-coupled dual-frequency discharges

Zoltán Donkó, Zoran Lj Petrović

Research output: Article

28 Citations (Scopus)

Abstract

Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF 4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies.

Original languageEnglish
Article number012011
JournalJournal of Physics: Conference Series
Volume86
Issue number1
DOIs
Publication statusPublished - jún. 1 2007

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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