Intelligent vacuum system controller

S. Fekete, G. Langer, S. Bohatka, I. Gal, J. Gál, K. Sepsy, J. Szadai

Research output: Article

Abstract

An intelligent vacuum system controller has been developed. The instrument houses two ionization and four pirani vacuum gauge control circuits. The measuring ranges are 1×10-3-1×10-9 and 1×10-3-1×10-3 mbar, respectively. Independent switching levels can be set for each of the gauges for control purposes. In the recent application the controller is connected to the ten channel quadrupole mass spectrometric measuring system, which has two independent, oil diffusion pump based vacuum systems. To ensure proper operation, the following are controlled and monitored: (i) switching on and off the pumps and valves; (ii) the states of the above, (iii) cooling water and compressed air supply and (iv) the temperature of the oil diffusion pumps. Both of the vacuum systems can be operated independently or in parallel. When either of the vacuum systems is switched on, the controller first checks the presence of the necessary conditions, i.e. cooling water and compressed air of the valves. When every condition is met, an automatic pumping down process begins, and when reaching the preset high vacuum value a ready signal is given. The actual state of the vacuum system can be followed on the schematic diagram of the front panel.

Original languageEnglish
Pages (from-to)226
Number of pages1
JournalVacuum
Volume40
Issue number1-2
Publication statusPublished - 1990

Fingerprint

vacuum systems
controllers
Vacuum
Controllers
diffusion pumps
compressed air
liquid cooling
Compressed air
Pumps
Cooling water
Pirani gages
oils
vacuum gages
Oils
Vacuum gages
air
circuit diagrams
high vacuum
Schematic diagrams
pumping

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Fekete, S., Langer, G., Bohatka, S., Gal, I., Gál, J., Sepsy, K., & Szadai, J. (1990). Intelligent vacuum system controller. Vacuum, 40(1-2), 226.

Intelligent vacuum system controller. / Fekete, S.; Langer, G.; Bohatka, S.; Gal, I.; Gál, J.; Sepsy, K.; Szadai, J.

In: Vacuum, Vol. 40, No. 1-2, 1990, p. 226.

Research output: Article

Fekete, S, Langer, G, Bohatka, S, Gal, I, Gál, J, Sepsy, K & Szadai, J 1990, 'Intelligent vacuum system controller', Vacuum, vol. 40, no. 1-2, pp. 226.
Fekete S, Langer G, Bohatka S, Gal I, Gál J, Sepsy K et al. Intelligent vacuum system controller. Vacuum. 1990;40(1-2):226.
Fekete, S. ; Langer, G. ; Bohatka, S. ; Gal, I. ; Gál, J. ; Sepsy, K. ; Szadai, J. / Intelligent vacuum system controller. In: Vacuum. 1990 ; Vol. 40, No. 1-2. pp. 226.
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