In situ observation of the evolution of porous silicon interference filter characteristics

J. Volk, K. Ferencz, J. J. Ramsden, A. L. Tóth, I. Bársony

Research output: Article

1 Citation (Scopus)

Abstract

Porous silicon multilayer formation was observed by in situ monitoring of the reflectivity spectra in the visible range. In order to reproduce the formation process optical model simulation was carried out. For demonstration of this method a 24-layer microcavity structure was selected. Although in this low wave-lengths region some absorption and scattering effects complicate the overall picture, the combined analysis throws new light upon the evolution of the porous silicon multilayer.

Original languageEnglish
Pages (from-to)1703-1706
Number of pages4
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume202
Issue number8
DOIs
Publication statusPublished - jún. 1 2005

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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