Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation

M. Dumitrescu, C. Cobianu, D. Lungu, D. Dascalu, A. Pascu, A. van den Berg, J. G.E. Gardeniers, S. Kolev, C. Ducso, I. Barsony

Research output: Paper

Abstract

The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.

Original languageEnglish
Pages145-148
Number of pages4
Publication statusPublished - 1997
EventProceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2) - Sinaia, Romania
Duration: okt. 7 1997okt. 11 1997

Other

OtherProceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2)
CitySinaia, Romania
Period10/7/9710/11/97

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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    Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., van den Berg, A., Gardeniers, J. G. E., Kolev, S., Ducso, C., & Barsony, I. (1997). Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. 145-148. Paper presented at Proceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2), Sinaia, Romania, .