High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics

Ambalanath Shan, M. Fried, György Juhász, Csaba Major, Olivér Polgár, Ágoston Németh, P. Petrik, Lila R. Dahal, Jie Chen, Zhiquan Huang, Nikolas J. Podraza, Robert W. Collins

Research output: Article

22 Citations (Scopus)

Abstract

An expanded-beam spectroscopic ellipsometer has been developed and applied toward in situ high-speed imaging/mapping analysis of large area spatial uniformity for multilayer coated substrates in roll-to-roll thin-film photovoltaics (PV). Slower speed instrumentation available in such analyses applies a 1-D detector array for spectroscopic mapping and involves width-wise translation of the ellipsometer optics over the moving coated substrate surface, measuring point-by-point in a time-consuming process. The expanded-beam instrument employs instead a 2-D detector array with no moving optics, exploiting one array index for spectroscopy and the second array index for line imaging across the width of a large area sample. Thus, the instrument enables imaging width-wise and mapping length-wise for uniformity evaluation at the high linear substrate speeds required for real-time, in situ, and online analysis in roll-to-roll thin-film PV. In this investigation, we employ the expanded beam technique to characterize the uniformity of the Ag, ZnO, and n-type hydrogenated amorphous silicon (a-Si:H) layers of an a-Si:H n-i-p structure deposited on a flexible polyimide substrate in the roll-to-roll configuration. Spectroscopic ellipsometry data across a line image were collected as the substrate was translated by a roll-to-roll mechanism. Coated areas as large as 12 cm × 45 cm were analyzed in this study for layer thickness and optical properties by applying the appropriate analytical models for the complex dielectric functions of the Ag, ZnO, and n-type a-Si:H layers.

Original languageEnglish
Article number6644259
Pages (from-to)355-361
Number of pages7
JournalIEEE Journal of Photovoltaics
Volume4
Issue number1
DOIs
Publication statusPublished - jan. 2014

Fingerprint

Spectroscopic ellipsometry
ellipsometry
high speed
Imaging techniques
Thin films
Substrates
thin films
Optics
ellipsometers
Detectors
Amorphous silicon
Polyimides
optics
Analytical models
Multilayers
Optical properties
Spectroscopy
detectors
polyimides
amorphous silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics. / Shan, Ambalanath; Fried, M.; Juhász, György; Major, Csaba; Polgár, Olivér; Németh, Ágoston; Petrik, P.; Dahal, Lila R.; Chen, Jie; Huang, Zhiquan; Podraza, Nikolas J.; Collins, Robert W.

In: IEEE Journal of Photovoltaics, Vol. 4, No. 1, 6644259, 01.2014, p. 355-361.

Research output: Article

Shan, A, Fried, M, Juhász, G, Major, C, Polgár, O, Németh, Á, Petrik, P, Dahal, LR, Chen, J, Huang, Z, Podraza, NJ & Collins, RW 2014, 'High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics', IEEE Journal of Photovoltaics, vol. 4, no. 1, 6644259, pp. 355-361. https://doi.org/10.1109/JPHOTOV.2013.2284380
Shan, Ambalanath ; Fried, M. ; Juhász, György ; Major, Csaba ; Polgár, Olivér ; Németh, Ágoston ; Petrik, P. ; Dahal, Lila R. ; Chen, Jie ; Huang, Zhiquan ; Podraza, Nikolas J. ; Collins, Robert W. / High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics. In: IEEE Journal of Photovoltaics. 2014 ; Vol. 4, No. 1. pp. 355-361.
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AU - Major, Csaba

AU - Polgár, Olivér

AU - Németh, Ágoston

AU - Petrik, P.

AU - Dahal, Lila R.

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AU - Huang, Zhiquan

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