Grating fabrication in dielectric coatings by TWIN-LIBWE

C. Vass, B. Kiss, Á Sipos, F. Újhelyi, P. Dombi, K. Osvay

Research output: Conference contribution

1 Citation (Scopus)

Abstract

Thin films are widely used in many applications, especially, the transparent layers are commonly used as high reflective and antireflex coatings on optical elements. Moreover, several spectroscopic applications need microstructured thin films deposited on bulk dielectric. Many procedures have been developed for etching transparent dielectrics. The conventional multistep techniques (hidrofluidic etching [1], powder blasting [2], ion etching [3]) require contact mask preparation on the target surface. The laser-based direct and indirect methods, however, can provide a good alternative for micro- and submicrometer structuring of transparent dielectrics without the complicate preparation of contact masks. The laser-induced backside wet etching (LIBWE) [4] is one of the most promising and flexible and applicable indirect technique. It was recently demonstrated that the combination of LIBWE with the two-beam interferometric method (TWIN-LIBWE) is well suited for fabrication of submicrometer period gratings onto the surface of bulk fused silica [5]. In this paper we report on the fabrication of micrometer period grating structure in SiO2, and ZrO2 thin films with the use of TWIN-LIBWE.

Original languageEnglish
Title of host publication2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
DOIs
Publication statusPublished - szept. 6 2011
Event2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 - Munich, Germany
Duration: máj. 22 2011máj. 26 2011

Publication series

Name2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011

Other

Other2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
CountryGermany
CityMunich
Period5/22/115/26/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Grating fabrication in dielectric coatings by TWIN-LIBWE'. Together they form a unique fingerprint.

  • Cite this

    Vass, C., Kiss, B., Sipos, Á., Újhelyi, F., Dombi, P., & Osvay, K. (2011). Grating fabrication in dielectric coatings by TWIN-LIBWE. In 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 [5943349] (2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011). https://doi.org/10.1109/CLEOE.2011.5943349