Fourier ellipsometry - An ellipsometric approach to Fourier scatterometry

P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S. F. Pereira, S. Burger, H. P. Urbach

Research output: Article

6 Citations (Scopus)


An extension of Fourier scatterometry is presented, aiming at increasing the sensitivity by measuring the phase difference between the reflections polarized parallel and perpendicular to the plane of incidence. The ellipsometric approach requires no additional hardware elements compared with conventional Fourier scatterometry. Furthermore, incoherent illumination is also sufficient, which enables spectroscopy using standard low-cost light sources.

Original languageEnglish
Article number15002
JournalJournal of the European Optical Society
Publication statusPublished - jan. 29 2015

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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