Experimental and theoretical determination of the mixing efficiency at low-energy Ar+ bombardment: Case study of the Cu/Co system

M. Menyhard, P. Süie

Research output: Article

6 Citations (Scopus)

Abstract

The mixing of a Co/Cu bilayer induced by low-energy ion bombardment was studied by AES depth profiling and molecular dynamic (MD) simulation. The conditions of the ion bombardment were as follows: Ar+ ion, 1 keV energy, 82° angle of incidence (with respect to the surface normal). In AES depth profiling, the in-depth concentration distribution was estimated from the measured Auger intensities assuming that the in-depth distribution is an erf function. The variance (σ2) of the erf function gave the broadening of the interface due to ion bombardment, which divided by the fluence (Φ) and deposited energy (FD given by SRIM) gave the mixing efficiency (σ2/Φ FD) to be 0.08 ± 0.01 nm5/keV. The mixing efficiency calculated by MD, 0.09 nm 5/keV, agreed well with that estimated from the experimental data, and both have been close to the value assuming ballistic mixing.

Original languageEnglish
Pages (from-to)487-492
Number of pages6
JournalSurface and Interface Analysis
Volume39
Issue number6
DOIs
Publication statusPublished - jún. 1 2007

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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