Disparity between current and voltage driven capacitively coupled radio frequency discharges

S. Wilczek, J. Trieschmann, J. Schulze, Z. Donkó, R. P. Brinkmann, T. Mussenbrock

Research output: Article

3 Citations (Scopus)

Abstract

In simulation as well as analytical modeling studies of low-pressure capacitively coupled radio frequency (CCRF) discharges, the assumption of both a driving voltage source or a driving current source is commonly used. It is unclear, however, how and to what extent the choice of the mode of driving, that prescribes either a sinusoidal discharge voltage or a sinusoidal discharge current, itself defines the discharge dynamics that results from these studies. To address this issue, 1d3v cylindrical particle-in-cell/Monte Carlo collisions simulations of asymmetric CCRF discharges are performed in the low pressure regime (p < 2 Pa). We study the nonlocal and nonlinear dynamics of these discharges on a nanosecond timescale. We find that the excitation of the plasma series resonance in the voltage driven case strongly enhances the nonlinear electron power dissipation. However, this resonance is suppressed when a current source is used, because the excitation of harmonics in the RF current is not allowed. Consequently, significant differences between both driving sources are observed in the plasma density as well as in the electron and the power coupling dynamics. We conclude that caution is advised in comparisons between simulations and experiments, as in the former the discharge dynamics is partly defined by the method of driving of the plasma source, while in the latter the addressed resonance phenomena are inherently present at low pressures, since experiments are typically voltage driven.

Original languageEnglish
Article number125010
JournalPlasma Sources Science and Technology
Volume27
Issue number12
DOIs
Publication statusPublished - dec. 28 2018

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radio frequency discharge
electric potential
low pressure
simulation
plasma density
excitation
electrons
dissipation
harmonics
collisions
cells

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Disparity between current and voltage driven capacitively coupled radio frequency discharges. / Wilczek, S.; Trieschmann, J.; Schulze, J.; Donkó, Z.; Brinkmann, R. P.; Mussenbrock, T.

In: Plasma Sources Science and Technology, Vol. 27, No. 12, 125010, 28.12.2018.

Research output: Article

Wilczek, S. ; Trieschmann, J. ; Schulze, J. ; Donkó, Z. ; Brinkmann, R. P. ; Mussenbrock, T. / Disparity between current and voltage driven capacitively coupled radio frequency discharges. In: Plasma Sources Science and Technology. 2018 ; Vol. 27, No. 12.
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AU - Mussenbrock, T.

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