DIFFUSION MEASUREMENT OF IMPLANTED Sb INTO Si, USING SiO//2 ENCAPSULATION.

E. Kotai, T. Nagy, O. Meyer, J. Gyulai, P. Revesz, G. Mezey, T. Lohner, A. Manuaba

Research output: Article

Abstract

The snow-plow effect, i. e. the result of three competitive events, the oxide growth rate, the segregation coefficient and the actual diffusion velocity, in case of antimony in silicon at 850 degree C results in a slow consumption of the antimony. This consumption is even more pronounced because of the enhanced oxidation effect of the antimony itself. This study summarizes some recent results on the snow-plow, that may contribute to the understanding of this peculiar effect.

Original languageEnglish
Pages (from-to)27-29
Number of pages3
JournalRadiation Effects
Volume47
Issue number1-4
Publication statusPublished - 1978

Fingerprint

Antimony
Snow plows
antimony
plows
snow
Silicon
Oxides
Oxidation
oxidation
oxides
silicon
coefficients

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kotai, E., Nagy, T., Meyer, O., Gyulai, J., Revesz, P., Mezey, G., ... Manuaba, A. (1978). DIFFUSION MEASUREMENT OF IMPLANTED Sb INTO Si, USING SiO//2 ENCAPSULATION. Radiation Effects, 47(1-4), 27-29.

DIFFUSION MEASUREMENT OF IMPLANTED Sb INTO Si, USING SiO//2 ENCAPSULATION. / Kotai, E.; Nagy, T.; Meyer, O.; Gyulai, J.; Revesz, P.; Mezey, G.; Lohner, T.; Manuaba, A.

In: Radiation Effects, Vol. 47, No. 1-4, 1978, p. 27-29.

Research output: Article

Kotai, E, Nagy, T, Meyer, O, Gyulai, J, Revesz, P, Mezey, G, Lohner, T & Manuaba, A 1978, 'DIFFUSION MEASUREMENT OF IMPLANTED Sb INTO Si, USING SiO//2 ENCAPSULATION.', Radiation Effects, vol. 47, no. 1-4, pp. 27-29.
Kotai E, Nagy T, Meyer O, Gyulai J, Revesz P, Mezey G et al. DIFFUSION MEASUREMENT OF IMPLANTED Sb INTO Si, USING SiO//2 ENCAPSULATION. Radiation Effects. 1978;47(1-4):27-29.
Kotai, E. ; Nagy, T. ; Meyer, O. ; Gyulai, J. ; Revesz, P. ; Mezey, G. ; Lohner, T. ; Manuaba, A. / DIFFUSION MEASUREMENT OF IMPLANTED Sb INTO Si, USING SiO//2 ENCAPSULATION. In: Radiation Effects. 1978 ; Vol. 47, No. 1-4. pp. 27-29.
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