Irradiation of highly oriented pyrolytic graphite (HOPG) with ArF excimer laser (λ = 193 nm) pulses of 2 J/cm2 fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8g/cm3, as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp3 hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650°C for 30 min recovers the graphite structure.
|Number of pages||3|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - jan. 1 1998|
ASJC Scopus subject areas
- Materials Science(all)