Diamond-like carbon layer formation on graphite by excimer laser irradiation

Á Mechler, P. Heszler, Z. Kántor, T. Szörényi, Z. Bor

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10 Citations (Scopus)


Irradiation of highly oriented pyrolytic graphite (HOPG) with ArF excimer laser (λ = 193 nm) pulses of 2 J/cm2 fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8g/cm3, as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp3 hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650°C for 30 min recovers the graphite structure.

Original languageEnglish
Pages (from-to)659-661
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Issue number6
Publication statusPublished - jan. 1 1998


ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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