Detection of P(O2)--Changes within a few milliseconds using sputtered strontium titanate

Josef Gerblinger, Hans Meixner

Research output: Conference contribution

6 Citations (Scopus)

Abstract

Between 700 and 1100°C the electrical conductivity of undoped SrTiO3 changes from p-type to n-type as P(O2) decreases from 1 to 10-15 bar. For bulk materials the response time tR90 of the oxygen sensor upon changes of the oxygen partial pressure in the surrounding atmosphere decreases quadratically with the thickness of the sensitive material. Thick samples show a diffusion-controlled dependence of their response time. Thin films of about 1 μm exhibit response times in the range of a few milliseconds at temperatures of 1000°C. Comparing the activation energy with values given in the literature for bulk materials shows that for great changes of the oxygen partial pressure the response time of the sputtered films is controlled by the diffusion of the oxygen vacancies in the sensitive material. The lower activation energies for oxygen diffusion in and out of the sensitive material at above 800°C indicate an effect where the response time of the oxygen sensor is dominated by the reaction of the oxygen molecules on the surface of the sensitive material.

Original languageEnglish
Title of host publicationTransducers '91
PublisherPubl by IEEE
Pages592-595
Number of pages4
ISBN (Print)0879425857
Publication statusPublished - dec. 1 1991
Event1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
Duration: jún. 24 1991jún. 28 1991

Publication series

NameTransducers '91

Other

Other1991 International Conference on Solid-State Sensors and Actuators
CitySan Francisco, CA, USA
Period6/24/916/28/91

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Gerblinger, J., & Meixner, H. (1991). Detection of P(O2)--Changes within a few milliseconds using sputtered strontium titanate. In Transducers '91 (pp. 592-595). (Transducers '91). Publ by IEEE.