Characterization of cobalt films grown on MgO(001) by dc-biased-sputter deposition

Mituru Hashimoto, Hong Qiu, Tatsuya Ohbuchi, M. Adamik, Hisashi Nakai, A. Barna, P. Barna

Research output: Article

13 Citations (Scopus)

Abstract

Cobalt films (90 nm thick) were deposited on MgO(001) substrates at 250°C by de-sputtering at 2.5 kV in pure argon gas. A bias voltage Vs between O and -180 V was applied to the substrate during the deposition. Reflection high-energy electron diffraction, cross-sectional transmission electron microscopy (XTEM) and X-ray photo electron spectroscopy, as well as measurements of the temperature coefficient of resistivity and saturation magnetization (4πMs), all as a function of Vs, confirmed that the structural and physical properties of cobalt films are most improved at -Vs= 140 V with a Co(001)\\MgO(001) and Co[010]\\MgO[010] relationship. A structural study of cobalt films prepared at -Vs= 140 V by high-resolution XTEM revealed that the stress induced in cobalt films is relaxed by the generation of defects such as misfit dislocations, lattice expansion and partial lattice distortions.

Original languageEnglish
Pages (from-to)792-797
Number of pages6
JournalJournal of Crystal Growth
Volume166
Issue number1-4
Publication statusPublished - szept. 1996

Fingerprint

Sputter deposition
Cobalt
cobalt
Crystal lattices
Reflection high energy electron diffraction
Argon
Substrates
Saturation magnetization
Bias voltage
Dislocations (crystals)
high energy electrons
Sputtering
Structural properties
X ray photoelectron spectroscopy
electron diffraction
Physical properties
physical properties
Gases
sputtering
argon

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Characterization of cobalt films grown on MgO(001) by dc-biased-sputter deposition. / Hashimoto, Mituru; Qiu, Hong; Ohbuchi, Tatsuya; Adamik, M.; Nakai, Hisashi; Barna, A.; Barna, P.

In: Journal of Crystal Growth, Vol. 166, No. 1-4, 09.1996, p. 792-797.

Research output: Article

Hashimoto, Mituru ; Qiu, Hong ; Ohbuchi, Tatsuya ; Adamik, M. ; Nakai, Hisashi ; Barna, A. ; Barna, P. / Characterization of cobalt films grown on MgO(001) by dc-biased-sputter deposition. In: Journal of Crystal Growth. 1996 ; Vol. 166, No. 1-4. pp. 792-797.
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AU - Barna, A.

AU - Barna, P.

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