Carbon - metal (Ni, Ti) nanocomposites were prepared by dc magnetron sputtering. The films were deposited at different deposition temperatures (25 - 800°C) on silicon (001) substrates covered with 300 nm thick siliconoxide. The input power of the magnetrons with Ni target was between 5 W and 25 W, and the magnetrons with Ti target between 10 W and 40 W. The input power of carbon target was 150 W. We found correlation between structural, electrical and mechanical properties of films, and developed the optimal structure of films for protective applications. Transmission electron microscopy and high resolution electron microscopy were used to determine the structure of films. The standard four probe technique was used for electrical measurements. The mechanical properties of films, e.g. hardness, modulus of elasticity were measured by nanoindentor. In both cases (C-Ni, C-Ti), the highest hardness (C-Ni ~ 11 GPa, C-Ti ~ 18 GPa) and highest modulus of elasticity (C-Ni ~ 114 GPa, C-Ti ~ 205 GPa) were obtained for the coating preparet at 200°C consisting of columnar (Ni3C and TiC) crystallites and 2 nm thin amorphous and graphite-like carbon matrix. The hardness of the coating is independent on the metal content but is influenced by the structure of thin carbon matrix.
|Title of host publication||New Research on Nanocomposites|
|Publisher||Nova Science Publishers, Inc.|
|Number of pages||24|
|Publication status||Published - dec. 1 2008|
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