BACKSCATTERING SPECTRA FOR QUANTITATIVE AES OF THIN OVERLAYERS.

Research output: Paper

3 Citations (Scopus)

Abstract

Electron backscattering spectra are presented for graphite, Si, stainless steel, Ge, Mo, W and Au in the 0. 7-3 keV range. The percentage of elastically reflected electrons and the Auger excitation backscattering factors were determined. A simple expression is presented for evaluating AES analysis of thin overlayers, taking into consideration the backscattering excitation of the substrate. Some results are presented for iron and tungsten substrates.

Original languageEnglish
Pages1392-1395
Number of pages4
Publication statusPublished - jan. 1 1980
EventUnknown conference - Cannes, Fr
Duration: szept. 22 1980szept. 26 1980

Other

OtherUnknown conference
CityCannes, Fr
Period9/22/809/26/80

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Gergely, G., Gruzza, B., & Menyhard, M. (1980). BACKSCATTERING SPECTRA FOR QUANTITATIVE AES OF THIN OVERLAYERS.. 1392-1395. Paper presented at Unknown conference, Cannes, Fr, .