Atomic force microscopy on cross-sections of optical coatings: a new method

Angela Duparré, Carsten Ruppe, Kaj A. Pischow, Miklós Adamik, P. B. Barna

Research output: Article

15 Citations (Scopus)


Two methods are described of preparing and investigating cross-sections of single layer and multilayer optical coatings by atomic force microscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both preparation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.

Original languageEnglish
Pages (from-to)70-75
Number of pages6
JournalThin Solid Films
Issue number1-2
Publication statusPublished - jún. 1 1995


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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