Active stabilization of the beam pointing of a high- power KrF laser system

A. Barna, I. B. Földes, J. Bohus, S. Szatmári

Research output: Article

4 Citations (Scopus)

Abstract

An active beam-pointing stabilization system has been developed for a high-power KrF laser system to eliminate the long-term drift of the directional change of the beam in order to have a stable focusing to a high intensity. The control of the beam direction was achieved by a motor-driven mirror activated by an electric signal obtained by monitoring the position of the focus of the output beam. Instead of large sized UV-sensitive position sensitive detectors a simple arrangement with scatter plates and photodiodes are used to measure the directionality of the beam. After the beam stabilization the long-term residual deviation of the laser shots is ~14 μrad, which is comparable to the shot-to-shot variation of the beam (~12 μrad). This deviation is small enough to keep the focal spot size in a micrometer range when tightly focusing the beam using off-axis parabolic mirrors.

Original languageEnglish
Pages (from-to)165-172
Number of pages8
JournalMetrology and Measurement Systems
Volume22
Issue number1
DOIs
Publication statusPublished - 2015

Fingerprint

High power lasers
high power lasers
Stabilization
stabilization
Photodiodes
Mirrors
shot
Detectors
Lasers
Monitoring
mirrors
deviation
photodiodes
micrometers
output
detectors
lasers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Instrumentation

Cite this

Active stabilization of the beam pointing of a high- power KrF laser system. / Barna, A.; Földes, I. B.; Bohus, J.; Szatmári, S.

In: Metrology and Measurement Systems, Vol. 22, No. 1, 2015, p. 165-172.

Research output: Article

Barna, A. ; Földes, I. B. ; Bohus, J. ; Szatmári, S. / Active stabilization of the beam pointing of a high- power KrF laser system. In: Metrology and Measurement Systems. 2015 ; Vol. 22, No. 1. pp. 165-172.
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