248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy

Zsolt Czigány, Miklos Adamik, Norbert Kaiser

Research output: Conference article

Abstract

LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

Original languageEnglish
Pages (from-to)187-193
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume2966
DOIs
Publication statusPublished - dec. 1 1997
EventLaser-Induced Damage in Optical Materials: 1996 - Boulder, CO, United States
Duration: okt. 7 1996okt. 7 1996

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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