248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy

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LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

Original languageEnglish
Pages (from-to)176-181
Number of pages6
JournalThin Solid Films
Issue number1-2
Publication statusPublished - jan. 14 1998


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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