248 nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy

Research output: Article

16 Citations (Scopus)

Abstract

LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

Original languageEnglish
Pages (from-to)176-181
Number of pages6
JournalThin Solid Films
Volume312
Issue number1-2
DOIs
Publication statusPublished - jan. 14 1998

    Fingerprint

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this