• 1298 Citations
  • 19 h-Index
19962019

Research output per year

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Research Output

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Conference article
2014

Optical characterization of macro-, micro- and nanostructures using polarized light

Petrik, P., Kumar, N., Juhasz, G., Major, C., Fodor, B., Agocs, E., Lohner, T., Pereira, S. F., Urbach, H. P. & Fried, M., jan. 1 2014, In : Journal of Physics: Conference Series. 558, 1, 012008.

Research output: Conference article

6 Citations (Scopus)
2012

Optical thin film metrology for optoelectronics

Petrik, P., jan. 1 2012, In : Journal of Physics: Conference Series. 398, 1, 012002.

Research output: Conference article

2 Citations (Scopus)
2010

Ellipsometric characterization of AlN films synthesized by Pulsed-Laser-Deposition

Szekeres, A., Vlaikova, E., Cziraki, A., Petrik, P., Socol, G., Ristoscu, C. & Mihailescu, I. N., jan. 1 2010, In : Journal of Physics: Conference Series. 253, 1, 012032.

Research output: Conference article

1 Citation (Scopus)
2008

Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition

Roeder, G., Manke, C., Baumann, P. K., Petersen, S., Yanev, V., Gschwandtner, A., Ruhl, G., Petrik, P., Schellenberger, M., Pfitzner, L. & Ryssel, H., dec. 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1231-1234 4 p.

Research output: Conference article

2 Citations (Scopus)
2 Citations (Scopus)
2 Citations (Scopus)
4 Citations (Scopus)

Ellipsometric characterization of flagellin films for biosensor applications

Kozma, P., Nagy, N., Kurunczi, S., Petrik, P., Hámori, A., Muskotál, A., Vonderviszt, F., Fried, M. & Bársony, I., dec. 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1427-1430 4 p.

Research output: Conference article

11 Citations (Scopus)
7 Citations (Scopus)

Non-collimated beam ellipsometry

Juhász, G., Horváth, Z., Major, C., Petrik, P., Polgár, O. & Fried, M., dec. 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1081-1084 4 p.

Research output: Conference article

24 Citations (Scopus)

Spectroscopic ellipsometric study of Ge nanocrystals embedded in SiO 2 using parametric models

Basa, P., Petrik, P., Fried, M., Dâna, A., Aydinli, A., Foss, S. & Finstad, T. G., dec. 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1332-1336 5 p.

Research output: Conference article

4 Citations (Scopus)
2006

Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

Szöllosi, P., Basa, P., Dücso, C., Máté, B., Ádám, M., Lohner, T., Petrik, P., Pécz, B., Tóth, L., Dobos, L., Dózsa, L. & Horváth, Z. J., febr. 1 2006, In : Current Applied Physics. 6, 2, p. 179-181 3 p.

Research output: Conference article

2 Citations (Scopus)
2004

Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry

Petrik, P., Cayrel, F., Fried, M., Polgár, O., Lohner, T., Vincent, L., Alquier, D. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 344-348 5 p.

Research output: Conference article

4 Citations (Scopus)

Dose-dependence of ion implantation-caused damage in silicon measured by ellipsometry and backscattering spectrometry

Fried, M., Petrik, P., Lohner, T., Khánh, N. Q., Polgár, O. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 404-409 6 p.

Research output: Conference article

12 Citations (Scopus)

Effect of ion current density on damage in Al ion implanted SiC

Battistig, G., López, J. G., Morilla, Y., Khánh, N. Q., Lohner, T., Petrik, P. & Ramos, A. R., jún. 1 2004, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 219-220, 1-4, p. 652-655 4 p.

Research output: Conference article

3 Citations (Scopus)

Ion implantation-caused damage in SiC measured by spectroscopic ellipsometry

Petrik, P., Shaaban, E. R., Lohner, T., Battistig, G., Fried, M., Lopez, J. G., Morilla, Y., Polgár, O. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 239-243 5 p.

Research output: Conference article

3 Citations (Scopus)

Optical characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

Schmidt, C., Petrik, P., Schneider, C., Fried, M., Lohner, T., Bársony, I., Gyulai, J. & Ryssel, H., máj. 1 2004, In : Thin Solid Films. 455-456, p. 495-499 5 p.

Research output: Conference article

6 Citations (Scopus)
2002

Ellipsometric study of ion-implantation damage in single-crystal silicon - An advanced optical model

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N. Q. & Gyulai, J., jan. 1 2002, In : Solid State Phenomena. 82-84, p. 765-770 6 p.

Research output: Conference article

1 Citation (Scopus)
2001

In situ spectroscopic ellipsometry in vertical furnace: Monitoring and control of high-temperature processes

Petrik, P. & Schneider, C., máj. 14 2001, In : Vacuum. 61, 2-4, p. 427-434 8 p.

Research output: Conference article

6 Citations (Scopus)
2000
23 Citations (Scopus)

In situ spectroscopic ellipsometry for the characterization of polysilicon formation inside a vertical furnace

Petrik, P., Lehnert, W., Schneider, C., Fried, M., Lohner, T., Gyulai, J. & Ryssel, H., márc. 27 2000, In : Thin Solid Films. 364, 1, p. 150-155 6 p.

Research output: Conference article

4 Citations (Scopus)
1998
1 Citation (Scopus)