• 1298 Citations
  • 19 h-Index
19962019

Research output per year

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Research Output

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Conference contribution
2019

Swift heavy ion irradiated planar waveguides in a rare earth doped tungsten Tellurite glass and a tungstate crystal

Bányász, I., Nagy, G. U. L., Rajta, I., Havránek, V., Vosecek, V., Fried, M., Petrik, P., Agócs, E., Kalas, B., Veres, M. & Holomb, R., dec. 10 2019, Proceedings of the International Conference of Computational Methods in Sciences and Engineering 2019, ICCMSE 2019. Simos, T. E., Simos, T. E., Simos, T. E., Kalogiratou, Z. & Monovasilis, T. (eds.). American Institute of Physics Inc., 040002. (AIP Conference Proceedings; vol. 2186).

Research output: Conference contribution

2018

Electrochemical Sensors for Detection of Different Ionic Species (Nitrites/Nitrates and Heavy Metals) in Natural Water Sources

Gartner, M., Lete, C., Chelu, M., Stroescu, H., Zaharescu, M., Moldovan, C., Brasoveanu, C., Gheorghe, M., Gheorghe, S., Duta, A., Labadi, Z., Kalas, B., Saftics, A., Fried, M., Petrik, P., Toth, E., Jankovics, H. & Vonderviszt, F., nov. 16 2018, 2018 41st International Semiconductor Conference, CAS 2018 - Proceedings. Dinescu, M. A., Dobrescu, D., Muller, A., Cristea, D., Dragoman, M., Muller, R., Ciurea, M. L., Neculoiu, D. & Brezeanu, G. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 2018-October. p. 329-332 4 p. 8539739

Research output: Conference contribution

2017

Design, Ion beam fabrication and test of integrated optical elements

Bányász, I., Pelli, S., Nunzi-Conti, G., Righini, G. C., Berneschi, S., Szilágyi, E., Németh, A., Fried, M., Petrik, P., Agócs, E., Kalas, B., Zolnai, Z., Khanh, N. Q., Rajta, I., Nagy, G. U. L., Havranek, V., Vosecek, V., Veres, M. & Himics, L., jan. 1 2017, PHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology. Ribeiro, P. A. & Raposo, M. (eds.). SciTePress, Vol. 2017-January. p. 279-285 7 p.

Research output: Conference contribution

2016

Ultrafast laser plasma assisted rare-earth doping for silicon photonics

Jose, G., Chandrappan, J., Kamil, S. A., Murray, M., Zolnai, Z., Agocs, E., Petrik, P., Steenson, P. & Krauss, T., dec. 16 2016, 2016 Conference on Lasers and Electro-Optics, CLEO 2016. Institute of Electrical and Electronics Engineers Inc., 7787390

Research output: Conference contribution

2015

Expanded beam spectro-ellipsometry for big area on-line monitoring

Fried, M., Major, C., Juhasz, G., Petrik, P. & Horvath, Z., 2015, Proceedings of SPIE - The International Society for Optical Engineering. SPIE, Vol. 9525. 95251S

Research output: Conference contribution

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Petrik, P., Fodor, B., Agocs, E., Kozma, P., Nador, J., Kumar, N., Endres, J., Juhasz, G., Major, C., Pereira, S. F., Lohner, T., Urbach, H. P., Bodermann, B. & Fried, M., jan. 1 2015, Modeling Aspects in Optical Metrology V. Silver, R. M., Bodermann, B. & Frenner, K. (eds.). SPIE, 95260S. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9526).

Research output: Conference contribution

1 Citation (Scopus)

Multiple angle of incidence, spectroscopic, plasmon-enhanced, internal reflection ellipsometry for the characterization of solid-liquid interface processes

Petrik, P., Agocs, E., Kalas, B., Kozma, P., Fodor, B., Nador, J., Major, C. & Fried, M., jan. 1 2015, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II. Grilli, S., Ferraro, P., Ritsch-Marte, M. & Stifter, D. (eds.). SPIE, 95290W. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9529).

Research output: Conference contribution

2 Citations (Scopus)
2014

Composite polymeric-inorganic waveguide fabricated by injection molding for biosensing applications

Dortu, F., Bernier, D., Cestier, I., Vandormael, D., Emmerechts, C., Fissi, L. E., Francis, L., Nittler, L., Houssiau, L., Fodor, B., Agocs, E., Petrik, P. & Fried, M., jan. 1 2014, ICTON 2014 - 16th International Conference on Transparent Optical Networks. IEEE Computer Society, 6876325. (International Conference on Transparent Optical Networks).

Research output: Conference contribution

1 Citation (Scopus)

Enabling silica for high density rare earth doping for integrated optoelectronic systems

Chandrappan, J., Murray, M., Petrik, P., Agocs, E., Zolnai, Z., Steenson, D. P., Jha, A. & Jose, G., júl. 21 2014, European Conference on Lasers and Electro-Optics, CLEO 2015. OSA - The Optical Society

Research output: Conference contribution

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

Endres, J., Kumar, N., Petrik, P., Henn, M. A., Heidenreich, S., Pereira, S. F., Urbach, H. P. & Bodermann, B., jan. 1 2014, Optical Micro- and Nanometrology V. SPIE, 913208. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9132).

Research output: Conference contribution

7 Citations (Scopus)

Optical characterization of laterally and vertically structured oxides and semiconductors

Petrik, P., Kumar, N., Agocs, E., Fodor, B., Pereira, S. F., Lohner, T., Fried, M. & Urbach, H. P., jan. 1 2014, Oxide-Based Materials and Devices V. SPIE, 89870E. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8987).

Research output: Conference contribution

2013

Characterization of thin ZnO films by vacuum ultra-violet reflectometry

Gumprecht, T., Petrik, P., Roeder, G., Schellenberger, M., Pfitzner, L., Pollakowski, B. & Beckhoff, B., dec. 10 2013, Oxide Semiconductors and Thin Films. p. 65-70 6 p. (Materials Research Society Symposium Proceedings; vol. 1494).

Research output: Conference contribution

1 Citation (Scopus)

High sensitivity optical characterization of thin films with embedded Si nanocrystals

Petrik, P. & Agocs, E., okt. 21 2013, Nanocrystal Embedded Dielectrics for Electronic and Photonic Devices. 4 ed. p. 43-52 10 p. (ECS Transactions; vol. 53, no. 4).

Research output: Conference contribution

Protein adsorption on detonation nanodiamond/polymer composite layers

Pramatarova, L. D., Hikov, T. A., Krasteva, N. A., Petrik, P., Dimitrova, R. P., Pecheva, E. V., Radeva, E. I., Agocs, E., Tsvetanov, I. G. & Presker, R. P., máj. 28 2013, Nanostructured Materials and Nanotechnology - 2012. p. 51-56 6 p. (Materials Research Society Symposium Proceedings; vol. 1479).

Research output: Conference contribution

2012

Application of a dual-spectral-range, divergent-beam spectroscopic ellipsometer for high-speed mapping of large-area, laterally-inhomogeneous, photovoltaic multilayers

Fried, M., Juhasz, G., Major, C., Nemeth, A., Petrik, P., Polgar, O., Salupo, C., Dahal, L. R. & Collins, R. W., jan. 1 2012, Advanced Materials Processing for Scalable Solar-Cell Manufacturing. p. 157-162 6 p. (Materials Research Society Symposium Proceedings; vol. 1323).

Research output: Conference contribution

7 Citations (Scopus)

Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors

Petrik, P., Egger, H., Eiden, S., Agocs, E., Fried, M., Pecz, B., Kolari, K., Aalto, T., Horvath, R. & Giannone, D., jan. 1 2012, Titanium Dioxide Nanomaterials. p. 81-87 7 p. (Materials Research Society Symposium Proceedings; vol. 1352).

Research output: Conference contribution

3 Citations (Scopus)

Fabrication of barrier-type slab waveguides in Er 3+-doped tellurite glass by single and double energy MeV N + ion implantation

Bányász, I., Zolnai, Z., Pelli, S., Berneschi, S., Nunzi-Conti, G., Fried, M., Lohner, T., Petrik, P., Brenci, M. & Righini, G. C., ápr. 17 2012, Integrated Optics: Devices, Materials, and Technologies XVI. 826406. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8264).

Research output: Conference contribution

3 Citations (Scopus)

NIL fabrication of a polymer based photonic sensor device in P3SENS project

Giannone, D., Dortu, F., Bernier, D., Johnson, N. P., Sharp, G. J., Hou, L., Khokhar, A. Z., Fürjes, P., Kurunczi, S., Petrik, P., Horvath, R., Aalto, T., Kolari, K., Ylinen, S., Haatainen, T. & Egger, H., jún. 20 2012, Organic Photonics V. 843529. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8435).

Research output: Conference contribution

3 Citations (Scopus)

Optical characterization using ellipsometry of Si nanocrystal thin layers embedded in silicon oxide

Agocs, E., Petrik, P., Fried, M. & Nassiopoulou, A. G., jan. 1 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2011. p. 367-372 6 p. (Materials Research Society Symposium Proceedings; vol. 1321).

Research output: Conference contribution

3 Citations (Scopus)

Wide-spectral-range, expanded-beam spectroscopic ellipsometer and its application for imaging/mapping of graded nanocrystalline Si:H films

Nemeth, A., Attygalle, D., Dahal, L. R., Aryal, P., Huang, Z., Salupo, C., Petrik, P., Juhasz, G., Major, C., Polgar, O., Fried, M., Pecz, B. & Collins, R. W., jan. 1 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2011. p. 267-272 6 p. (Materials Research Society Symposium Proceedings; vol. 1321).

Research output: Conference contribution

2 Citations (Scopus)
2011

Atomic layer deposited Al 2O 3 as characterized reference samples for nanolayer metrology

Nutsch, A., Lemberger, M. & Petrik, P., dec. 1 2011, Frontiers of Characterization and Metrology for Nanoelectronics: 2011. p. 193-197 5 p. (AIP Conference Proceedings; vol. 1395).

Research output: Conference contribution

1 Citation (Scopus)

Design and process development of a photonic crystal polymer biosensor for point of care diagnostics

Dortu, F., Egger, H., Kolari, K., Haatainen, T., Furjes, P., Fekete, Z., Bernier, D., Sharp, G., Lahiri, B., Kurunczi, S., Sanchez, J. C., Turck, N., Petrik, P., Patko, D., Horvath, R., Eidenb, S., Aalto, T., Watts, S., Johnson, N. P., De La Ruef, R. M. & 1 others, Giannonea, D., júl. 25 2011, Clinical and Biomedical Spectroscopy and Imaging II. 80870D. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 8087).

Research output: Conference contribution

8 Citations (Scopus)
2010

Characterisation of slab waveguides, fabricated in CaF2 and Er-doped tungsten-tellurite glass by MeV energy N+ ion implantation, using spectroscopic ellipsometry and m-line spectroscopy

Bányász, I., Berneschi, S., Lohner, T., Fried, M., Petrik, P., Khanh, N. Q., Zolnai, Z., Watterich, A., Bettinelli, M., Brenci, M., Nunzi-Conti, G., Pelli, S., Righini, G. C. & Speghini, A., júl. 23 2010, Silicon Photonics and Photonic Integrated Circuits II. 77190G. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7719).

Research output: Conference contribution

1 Citation (Scopus)
2009

Annealing effect on optical barrier in ion-implanted tellurite glass waveguides

Berneschi, S., Cacciari, I., Nunzi Conti, G., Pelli, S., Righini, G. C., Bányász, I., Khanh, N. Q., Lohner, T., Petrik, P., Zolnai, Z., Bettinelli, M., Speghini, A., Mescia, L. & Prudenzano, F., jún. 15 2009, Integrated Optics: Devices, Materials, and Technologies XIII. 721807. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7218).

Research output: Conference contribution

3 Citations (Scopus)

Complementary metrology within a European joint laboratory

Nutsch, A., Beckhoff, B., Altmann, R., Van Den Berg, J. A., Giubertoni, D., Hoenicke, P., Bersani, M., Leibold, A., Meirer, F., Mueller, M., Pepponi, G., Otto, M., Petrik, P., Reading, M., Pfitzner, L. & Ryssel, H., jan. 1 2009, Ultra Clean Processing of Semiconductor Surfaces IX: UCPSS 2008. Trans Tech Publications Ltd, p. 97-100 4 p. (Solid State Phenomena; vol. 145-146).

Research output: Conference contribution

13 Citations (Scopus)

Dielectric function and defect structure of CdTe implanted by 350-keV Bi ions

Petrik, P., Fried, M., Zolnai, Z., Khánh, N. Q., Li, J., Collins, R. W. & Lohner, T., dec. 1 2009, Materials Research Society Symposium Proceedings - Photovoltaic Materials and Manufacturing Issues. p. 81-87 7 p. (Materials Research Society Symposium Proceedings; vol. 1123).

Research output: Conference contribution

3 Citations (Scopus)

Effect of high-temperature annealing on evaporated silicon oxide films: A spectroscopic ellipsometry study

Szekeres, A., Vlaikova, E., Lohner, T., Petrik, P., Cziraki, A., Zlobin, S. & Shepeliavyi, P., dec. 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 379-384 6 p. (ECS Transactions; vol. 25, no. 3).

Research output: Conference contribution

High resolution depth profile analysis of ultra thin high-κ Hf based films using MEIS compared with XTEM, XRF, SE and XPS

Van Den Berg, J. A., Reading, M. A., Parisini, A., Kolbe, M., Beckhoff, B., Ladas, S., Fried, M., Petrik, P., Bailey, P., Noakes, T., Conard, T. & De Gendt, S., dec. 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 349-361 13 p. (ECS Transactions; vol. 25, no. 3).

Research output: Conference contribution

9 Citations (Scopus)

Homogeneity check of ion implantation in silicon by wide-angle ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P. & Battistig, G., dec. 1 2009, 17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009. 5373448. (17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009).

Research output: Conference contribution

1 Citation (Scopus)

Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium

Giubertoni, D., Pepponi, G., Beckhoff, B., Hoenicke, P., Gennaro, S., Meirer, F., Ingerle, D., Steinhauser, G., Fried, M., Petrik, P., Parisini, A., Reading, M. A., Streli, C., Van Den Berg, J. A. & Bersani, M., nov. 30 2009, Frontiers of Characterization and Metrology for Nanoelectronics - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics. p. 45-49 5 p. (AIP Conference Proceedings; vol. 1173).

Research output: Conference contribution

3 Citations (Scopus)

Optical and electrical properties of Al doped ZnO layers measured by wide angle beam spectroscopic ellipsometry

Major, C., Juhász, G., Nemeth, A., Labadi, Z., Petrik, P., Horváth, Z. & Fried, M., dec. 1 2009, Transparent Conductors and Semiconductors for Optoelectronics. p. 31-36 6 p. (Materials Research Society Symposium Proceedings; vol. 1109).

Research output: Conference contribution

Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction

Petrik, P., Milita, S., Pucker, G., Nassiopoulou, A. G., Van Den Berg, J. A., Reading, M. A., Fried, M., Lohner, T., Theodoropoulou, M., Gardelis, S., Barozzi, M., Ghulinyan, M., Lui, A., Vanzetti, L. & Picciotto, A., dec. 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 373-378 6 p. (ECS Transactions; vol. 25, no. 3).

Research output: Conference contribution

2 Citations (Scopus)
2008

Ellipsometry on ion implantation induced damage

Petrik, P., Lohner, T., Polgar, O. & Fried, M., dec. 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 93-101 9 p. 4690541. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Conference contribution

1 Citation (Scopus)

Nitrogen-ion-implanted planar optical waveguides in Er-doped tellurite glass: Fabrication and characterization

Bányász, I., Berneschi, S., Cacciari, I., Fried, M., Lohner, T., Nunzi-Conti, G., Pászti, F., Pelli, S., Petrik, P., Righini, G. C., Watterich, A. & Zolnai, Z., márc. 31 2008, Optical Components and Materials V. 68901A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6890).

Research output: Conference contribution

1 Citation (Scopus)

Si surface preparation and passivation by vapor phase of heavy water

Edit Pap, A., Petrik, P., Pecz, B., Battistig, G., Barsony, I., Szekrenyes, Z., Kamaras, K., Schay, Z. & Nenyei, Z., dec. 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 219-228 10 p. 4690558. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Conference contribution

1 Citation (Scopus)
2006

Spectroscopic ellipsometric study of LPCVD-deposited Si nanocrystals in SiNx and Si3N4

Basa, P., Petrik, P. & Fried, M., dec. 1 2006, Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06. p. 87-89 3 p. 4133084. (Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06).

Research output: Conference contribution

2005

Ellipsometric study of SiNx/nc-Si/SiNx multilayers

Basa, P. & Petrik, P., dec. 1 2005, Proceedings - 2005 International Semiconductor Conference, CAS 2005. p. 417-420 4 p. 1558815. (Proceedings of the International Semiconductor Conference, CAS; vol. 2).

Research output: Conference contribution

2002

Ellipsometric characterization of shallow damage profiles created by Xe-implantation into silicon

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N. Q., Gyulai, J. & Ramadan, E., 2002, Proceedings of the International Conference on Ion Implantation Technology. Institute of Electrical and Electronics Engineers Inc., Vol. 22-27-September-2002. p. 601-604 4 p. 1258077

Research output: Conference contribution

2000

Advanced optical model for the ellipsometric study of ion implantation-caused damage depth profiles in single-crystalline silicon

Petrik, P., Polgár, O., Fried, M., Lohner, T., Khánh, N. Q. & Gyulai, J., dec. 1 2000, 2000 International Conference on Ion Implantation Technology, IIT 2000 - Proceedings. p. 151-154 4 p. 924112. (Proceedings of the International Conference on Ion Implantation Technology).

Research output: Conference contribution

1 Citation (Scopus)